Richard DeVito
boston, MassachusettsPhysics
Energetic deposition processes of metals, semiconductors and optical coatings
DC magnetron sputtering and ion assisted deposition of optical coatings
RF and DC ion sources
Electrical, optical and mechanical analysis of thin films (SEM, FTIR. Ellipsometry)
Installation, operation and maintenance of semiconductor equipment (various)
DOE and SPC tools for process and yield improvement (MINITAB, JMP)
Optical coating design (TFCalc, Optilayer, Essential Macleod)
Operation and installation of batch and inline film deposition systems
Film stress, hardness, index of refraction and adhesion characterization
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