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Larry Hartsough
Ph.D. ·
berkeley, California
Materials Science
Semiconductor Manufacturing
Vacuum system design & practice
Equipment
Cluster tool design and interfaces
Physical metallurgy
PVD Thin film process and process control
Thin film metallurgy
Planar and hollow-cathode magnetron sputter source design
Magnetic modeling
Electrostatic chuck technology
SEMI Standards Development and Compliance
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